Home Probe Stations Everbeing 2D Heterostructure Transfer and Characterisation System

Everbeing 2D Heterostructure Transfer and Characterisation System

Product Code:
Transfer System
Manufacturer: EverBeing

2D crystal heterostructures are assembled from crystals that are one or a few atomic layers in thickness are becoming increasingly more popular in many research areas like Graphene and physics. These 2D material structures are assembled using transfer systems.

  • 5 -axis of positioning
  • High power, long working distance Monozoom Microscope
  • Precision coaxial chuck stage
  • Chuck rotation, ±12 degrees with 0.005° resolution
  • Device characterisation
  • Optional Fibre Optic, DC, RF and mmWave probes
  • Optional Heated Chuck
  • Optional Anti-vibration table or table-top.

Each system can be custom designed or an upgrade to your existing probe station, please contact us to discuss in more information. 

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The Transfer System Probe station is designed to allow flexibility for the user and precise positioning and alignment at an affordable price.

Our system design is based on our standard 4-inch probe station for sample characterisation with additional options like a swapable heated chuck, precise chuck rotation and a high power Monozoom microscope with a 54mm working distance.

The transfer is done using a glass slide holder that is accurately positioned over the chuck to within 0.3µm in X-Y-Z then tilted in to make the transfer.

2D heterostructures are assembled from one or few atomic layers in thickness crystals are becoming increasingly more popular in condensed matter physics and other research areas. These structures are assembled using transfer machines, often based on mask aligners, probe stations or, home-made.

The transfer is done using a glass slide holder that is held over the chuck. Once in place the specimen can be precisely aligned by rotating the chuck to within 0.01 degree. The top layer is accurately positioned over the chuck to within 0.3µm in X-Y-Z then tilted in to make the transfer.

Whilst each system has its merits, our system design offer both transfer and is based on a 4-inch probe station, with a heated chuck, precise chuck rotation and a high power monozoom microscope with a long working distance.

  • The sample is located using the 1:67 ratio monozoom microscope fitted with 5.0X Plan Apo lens with 250X-1650X zoom and 45mm WD
  • The sample is positioned to within 10µm using the X-Y coaxial stage
  • The sample is rotated to within 0.005° using the chuck theta control
  • The transfer is done using a glass holder that is accurately positioned over the chuck/sample to within 0.3µm in X-Y-Z.
  • Once the sample is positioned, aligned and rotated, then the glass slide holder can be tilted in both pitch and yaw to make the transfer.

6-axis of sample positioning:

  • Chuck rotation: ±12 degrees with 0.005° resolution
  • X-Axis: 12mm of movement with an accuracy of 0.35µm (200TPI)
  • Y-Axis: 12mm of movement with an accuracy of 0.35µm (200TPI)
  • Z-Axis: 12mm of movement with an accuracy of 0.35µm (200TPI)
  • Tilt: ±6 degrees with greater than 0.1° resolution
  • Pitch: ±12 degrees with greater than 0.1° resolution

Accessories:

Antivibration tables and table top Antivibration units.

Micropositioners: available in vacuum (V), permanent magnet (M) or our most popular choice magnet on/off (E).

EB-005-100: 0.75 µm resolution micropositioner with 12mm of travel in X-Y and Z.
EB-005-200: 0.3 µm resolution micropositioner with 12mm of travel in X-Y and Z.
EB-050: 0.8 micron resolution micropositioner.
EB-700: 3 micron micropositioner. 38mm W x 62mm D x 45mm H (Weight 200g)

Probe Tip Holders:

Screw Type
Screw Nut Type
Spring Type
Tubular

Probe Tips – 0.35 µm to 200 µm
RF Probing – 1GHz to mmWave

 

Photonic Probe Station Specification   
Station Footprint 580 mm W x 460 mm D
Station Height 450 mm (to Platen)/700 mm (to Microscope)
Station Weight 35kg
Platen Material Hard Chrome Plated Steel
Platen Dimension 250 mm Inner, 450mm Outer
Platen Capacity 2 Fibre Holders and 6 DC Positioners
Positioner Mount Magnetic ON/OFF Switch
No. of Vacuum Switches 3 vacuum ports
Chuck Size 4 Inch / 100mm
Chuck Material Stainless Steel
Chuck Stage Type Coaxial (Large Knob Optional)
Chuck Travel Range 4” x 4” or 100mm x 100mm
Chuck Quick movement 25mm per turn
Chuck Fine movement  1 micron
Chuck Planarity 3 micron
Chuck Rigidity 15 μm/ 10 N@edge
Chuck Vacuum Grooves Center, 1”, 3” ,5” (Individually Controlled)
Chuck Bias Capacity Up to 500 V
Chuck Isolation 1 GΩ
DUT Size Range 2mm- 150mm
Microscope Zoom Range 1.0X objective (82mm WD) 1.5X to 10X
Microscope Magnification Range (15X eye pieces) 22.5X to 150X
*Other magnifications are available from 25X to 1650X, please ask for more information.
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