EverBeing Environmental Probe Station, Oxygen Free, Hot Chuck with Cooling
Product Code:
68156
Manufacturer: EverBeing
The Everbeing Chamber Plus series of analytical probe stations is an extension of their flagship EB Series probe station.
The Chamber Plus probe station offers a sealed environment for an oxygen-free environment and double as a Faraday cage enclosure for extreme limits for probing. While the DUT is enclosed within the chamber, all probing operations such as chuck stage movement, micropositioning, are still readily available. With this product you can achieve the following into your test:
- Temperature range within -60˚C to 400˚C (Optional 500˚C from RT)
- Low leakage currents down to 20 fA
- RF probing up to 67 GHz or higher depending on VNA
Environmental Probe Station with Vacuum Chuck available in 4", 6", 8", 12" Wafer diameter
- Large Knob for High Precision Stage
- Back-lash free movement
- Mounting for up to 8 micropositioners
- 4.5” Probe Card Holder compatible
- Platen Z-Motion Range 6mm Pneumatic
- Platen Fine resolution 1 µm
- Micropositioner Standby Dock
- Microscope Stage Travel Range 2” X 2” (50 X 50mm)
- Stainless Steel or Gold Plated Vacuum Chuck
| Station Specifications | |
| Station Footprint | 760mm W x 660mm D |
| Station Height | 450mm (to Platen)/700mm (to Microscope) |
| Station Weight | 80kg |
| Platen Material | Hard Chrome Plated Steel |
| Platen Dimension | 250mm inner, 450mm outer |
| Platen Capacity | 8DC or 4RF 4DC |
| Position Mount | Magnetic ON/OFF switch |
| No. of Vacuum Switches | 4 |
| Platen Z-Motion Range | 6mm Pneumatic |
| Platen Z-Fine Resolution | 1μm |
| Platen Z Movement | Gear and Belt (Fine, Lever (Coarse) |
| Chuck Material | Stainless Steel |
| Chuck Stage Type | Large Knob Precision Movement |
| Chuck Travel Range | 6" x 6" |
| Chuck Quick Movement | Quick Y Rail Movement for Easy Sample Loading |
| Chuck Fine Resolution | 1 μm |
| Chuck Theta Coarse Travel | 20° |
| Chuck Theta Fine Resolution | 001° |
| Large Knob Chuck Movement | High Precision Linear Stage |
| Chuck Size | 6" (150mm) |
| Chuck Planarity | 3 μm |
| Chuck Rigidity | 15 μm/10N@edge |
| Chuck Vaccum Grooves | Centre, 0.5", 1.5", 2.5" (Individually Controlled) |
| Chuck Bias Capacity | Up to 2kV |
| Chuck Isolation | 5 GΩ |
| DUT Size Range | 2mm - 150mm |
| Microscope Stage Type | High Precision Linear Stage |
| Microscope Stage Resolution | 1 μm |
| Microscope Stage Travel Range | 2" x 2" |
| Microscope Tilting (Optional) | 35" |
Everbeing Chamber Plus Datasheet Write Your Own Review
| Photo | Product | SKU | |
|---|---|---|---|
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 | Everbeing EB-6 Series - Analytical Probe Station | - | > |
 | EverBeing BD-Series - Analytical Probe Station. BD-4, BD-6, BD-8, BD-12 | - | > |
 | EverBeing C-2 RF Probe Station | - | > |
 | EverBeing EB-6V MMWAVE THz Wafer Probe Station | - | > |
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 | Everbeing 2D Heterostructure Transfer and Characterisation System | - | > |
 | Nitto Kohki LV-125A Enclosed Vacuum Pump, (-250 mm Hg at 7 litres/min) VP-7 | - | > |
 | Nitto Kohki VP 0125 Linear Piston Vacuum Pump | - | > |
 | Nitto Kohki VP 0140 Linear Piston Vacuum Pump | - | > |
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