EverBeing EB-6A MMWAVE THz Wafer Probe Station
EverBeing offer a range of Millimeter-Wave Probe Stations for precise integration with your existing Vector Network Analysers (VNA), wave guides and frequency extenders from leading brands like Anritsu, Keysight, Rohde & Schwarz, VDI, OML. Two models are available EB-6A and EB-6V to accommodate the different sizes of waveguides and frequency extenders you prefer.
The EB-6A is designed specifically to accommodate Anritsu equipment whilst the EB-6V is more generic to work with Keysight, Rohde & Schwarz, VDI, and OML mmWave modules.
The EB-6V is more generic and designed to work with Keysight, Rohde & Schwarz, VDI, and OML mmWave modules.
The EB-6A is a market proven solution developed closely together with Anritsu and provides the following features:
- Customised positioners specifically for Anritsu broadband millimeter-wave modules
- Integrated heat-sink and mount for millimeter-wave modules
- Precise integration allowing direct link of probes
- Double-side mmW probing upgradeable
- Coaxial style high precision stage
- Back-lash free movement
- 4.5” probe card holder compatible
- Micropositioner standby dock
Applications
- High performance RF
- Single broadband probing
- Differential mm-Wave
- Basic DC (IV/CV)
Accessories
- Hot chuck with auxiliary chuck with temperature controller
- Vibration free table
- Shielding box
| Station Specifications | |
| Station Footprint | 760 mm W x 660mm D |
| Station Height | 450 mm (to Platen)/700 mm (to Microscope) |
| Station Weight | 80kg |
| Platen Material | Hard Chrome Plated Steel |
| Platen Dimension | 250 mm Inner, 450mm Outer |
| Platen Capacity | 12 DC or 4 RF and 4 DC |
| Positioner Mount | Magnetic ON/OFF Switch |
| No. of Vacuum Switches | 4 |
| Chuck Material | Stainless Steel |
| Chuck Stage Type | Coaxial |
| Chuck Travel Range | 6” x 6” |
| Chuck Fine Resolution | 1 μm |
| Chuck Theta Coarse Travel | 360˚ |
| Chuck Theta Fine Resolution | 0.01˚ |
| Chuck Z-Motion Range | 4 mm |
| Chuck Z-Fine Resolution | 1 μm |
| Coaxial Chuck Movement | Bevelled Gear and Rack 0.8 mm Pitch |
| Chuck Size | 6” (150 mm) |
| Chuck Planarity | 3 μm |
| Chuck Rigidity | 15 μm / 10 N @ edge |
| Chuck Vacuum Grooves | Center, 0.5”, 1.5” ,2.5” (Individually Controlled) |
| Chuck Bias Capacity | Up to 2 kV |
| Chuck Isolation | 5 GΩ |
| DUT Size Range | 2 mm - 150 mm |
| Microscope Stage Type | High Precision Linear Stage |
| Microsope Stage Resolution | 1 μm |
| Microscope Stage Travel Range | 2” x 2” |
| Microscope Tilting (Optional) | 35˚ |
| Microscope Zoom Range | 1x - 2x |
| Microscope Eye Piece | 10x |
| Microscope Objectives | 2x, 10x, 20x |
| Microscope Magnification Range | 20x-400x |
Everbeing EB-6A Datasheet 
