Some brief notes on the systems and technology over the years:

Heterodyne profiler

Maxim 5700: Micro Fizeau, tip/tilt in the head, PSI (Phase Shifting Interferometry), HPUX system controllers.

Maxim 3D: PSI, 2 wavelengths for rougher surfaces, HPUX system controllers.

NewView 100: The first Scanning White Light Interferometer (SWLI) from Zygo, uses Frequency Domain Analysis (FDA) to achieve high resolution over the entire scan range. 100 µm scan using PiFoc, open loop, finite conjugate objectives. HPUX system controllers. Standard microscope stand. Wyko RST was around during this time.

NewView 200: Switch to infinite conjugate objectives that work with all future NewView’s, Nexview’s and ZeGage’s. Open-loop and closed-loop PiFoc piezo scanner, 100 µm range. HPUX system controllers. Standard microscope stand. Extended scan implemented.

NewView 5000 series: Introduction of “A” frame designed using Finite Element Analysis (FEA) to minimise vibrations.  Used on all subsequent NewView systems.  Has extended scan to measure up to 5000 µm. Variable zoom. End of PC upgrade route due to frame-grabber board no longer being available.

NewView 6000 series: Introduction of CAN bus electronics and away from Type II board. Fixed zoom and zoom turret available (NewView 6300).

NewView 600: Low cost single objective system, manual stages.

NewView 700: Low cost single objective system, manual stages.

NewView 7000 series

ZeMapper: Available after ZeMetrics acquisition. Good for large area parts such as hard disk drive substrates. Used ZeMaps software. Discontinued 2014.

ZeScope: Available after ZeMetrics acquisition. Good for large volume parts such as larger engineering parts. Used ZeMaps software. Discontinued 2014.

ZeGage: Jointly developed by Zygo and new ZeMetrics team. Used NewView optical head and ZeMaps software. Z scanner is non-piezo based. Migrated to new Mx software.

Nexview: Flagship optical profiler from Zygo, and first to use new Mx software. Introduced many new features such as crash protection, colour imaging, the “More Data” concept, SmartPSI, oversampling, new 5.5x and 2.75x objectives, parfocal imaging, and full automation capability (including motorised filters and stops).

NewView 8000 series: Introduces the new Mx software to the NewView family. Has many new features in common with the Nexview including crash protection, the “More Data” concept, oversampling, new 5.5x and 2.75x objectives, and parfocal imaging. Mx facilitates greater automation capability compared to previous profilers.

ZeGage Pro and Pro HR, NewView 9000, Nexview NX2: Updated range of profilers with a new 1.9 MP high-sensitivity and high-speed sensor. Introduces fast focus technology and smart features such as ‘Find Part’ to automatically and rapidly focus on the surface – even over many millimetres of scan range – and ‘SmartSetup’ which extends the part finder by also detecting the optimal acquisition settings and taking the first measurement. This generation is available for demonstration by Lambda Photometrics.

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