Characterisation, Measurement & Analysis
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Large Area Ion Milling with the Fischione M1062 TrionMill

A fully automated tabletop argon ion mill that features highly flexible milling parameter adjustment. The instrument offers large-scale milling of planar and cross section samples. Samples of up to 50 mm diameter are effectively processed with three ion sources, which creates the largest and most uniform flat area achievable by ion milling. Allows the direct transfer of environmentally sensitive materials to a SEM or FIB.

  • Three independently adjustable TrueFocus ion sources
  • Planar sample sizes up to 50 mm diameter by 25 mm height
  • Controllable beam diameter over a wide range of operating energies (100 eV to 10 keV)
  • Liquid nitrogen-cooled sample stage (optional)
  • Vacuum/inert gas/cryogenic transfer system protects environmentally sensitive samples (optional)

The position of each of the three ion sources is independently adjustable; different beam positions enable different milling characteristics. For example, aligning the ion beams in the default position:
(a) was ideal for preparing a 4.5 mm semiconductor solder bump cross-section sample for SEM analyses (b).
However, the large planar milling beam positioning (c) was optimal for preparing a 50 mm copper sample (d) for SEM and electron backscatter diffraction (EBSD) analyses (e) of the (clockwise from left) centre top, right middle, right bottom, and left bottom areas of the sample.

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Lambda Photometrics is the leading UK Distributor of Characterisation, Measurement and Analysis solutions with particular expertise in Instrumentation, Laser and Light based products, Optics, Electro-Optic Testing, Machine Vision, Optical Metrology, Fibre Optics and Microscopy.