Fischione

• Simultaneously cleans transmission and scanning electron microscope specimens and specimen holders
• Enhances imaging and analytical results
• Removes existing carbonaceous contamination
• Prevents contamination
• No etching or sputtering
• Storage in clean vacuum

• Ultra-low energy ion source
• Concentrated ion beam
• Removes amorphous and implanted layers
• Ideal for post-focused ion beam processing and milling of conventionally prepared specimens
• Liquid nitrogen-cooled specimen stage

• Ion milling for TEM
• High energy operation for rapid milling; low energy operation for specimen polishing
• Two independently adjustable TrueFocus ion sources
• Ion source maintains its small beam diameter over a wide range of operating energies (100 eV to 10 keV)
• Continuously adjustable milling angle range of -15 to +10°
• Adjustable 10-inch touch screen with a user-friendly interface for simple setup of milling parameters
• Specimen holder with x-y adjustment
• In situ viewing and image capture during milling
• Liquid nitrogen-cooled specimen stage

• Minimal maintenance - 

  Due to the efficiency of ionization, maintenance of the TrueFocus ion source is minimal and the components have an extremely long life. Material sputtered from the ion source is negligible, minimizing both sample contamination and component maintenance. Automated shuttering prevents the buildup of sputtered material on the viewing window. All system components are easily accessible for routine cleaning.
• Programmable - Sample rotation is 360° with variable rotation speed and a sample rocking feature. The instrument automatically senses the sample thickness and establishes the milling plane, which maximizes throughput. A magnetic encoder provides absolute positioning accuracy.
• Automatic termination - The ion milling process can be automatically terminated by elapsed time or by temperature. 
• Time - A timer allows milling to continue for a predetermined time and then turns off the energy to the ion sources when the time has elapsed. The sample remains under vacuum until the load lock is vented. 
• Temperature - The thermal safeguard associated with the sample cooling system will stop the process if the sample stage reaches a preset temperature. 

Fischione Instruments’ Model 1062 TrionMill is an excellent tool for creating the sample surface characteristics needed for SEM imaging and analyses. The TrionMill’s three ion sources provide large-scale milling of planar and cross-section samples. High-energy operation allows rapid milling of large areas (up to 50 mm); low-energy operation allows gentle sample polishing.

• Three independently adjustable TrueFocus ion sources 
• Planar sample sizes up to 50 mm diameter by 25 mm height 
• Controllable beam diameter over a wide range of operating energies (100 eV to 10 keV)
• Liquid nitrogen-cooled sample stage (optional)
• Vacuum/inert gas/cryogenic transfer system protects environmentally sensitive samples (optional)
• Remote operation

• Selected-area milling on full 300 mm wafers
• Top-down delayering
• Expose multiple device layers and structures
• For use in multiple areas of a semiconductor fabrication facility:
  – Research and development
  – Process control
  – Yield enhancement
  – Failure analysis

Fischione Instruments Model 1064 ChipMill is a fully integrated solution for large-scale delayering – up to a 10 x 10 mm milling area – of both memory and logic semiconductor devices. Compared to all other methods, the ChipMill produces the flattest surface over the largest area. The ChipMill’s artifical intelligence automatically adjusts milling parameters to yield nanometer flatness within the prepared area.

• Nanometer flatness of the prepared area
• Milling area up to 10 x 10 mm 
• Automated sample height detection
• User-friendly interface for the setup of milling parameters and display of images and analytical data
• On-device touchscreen for managing sample insertion and removal
• End-pointing by time, chip structure, or chemical composition
• Components:
  
  • Ion source
  • Optical camera 
  • Electron beam column
  • Secondary electron detector (SED)
  • Backscattered electron (BSE) detector
  • Energy dispersive X-ray spectrometer (EDS)
  • Secondary ion mass spectrometer (SIMS)

• Simultaneously cleans specimens, specimen holders, and specimen mounts
• No change to elemental composition or structural characteristics
• Multiple gas inlets with mixing capabilities
• Evacuates vacuum storage containers

• Achieve ultimate specimen quality – free from amorphous and implanted layers
• Complements FIB technology
• Milling without introduction of artifacts
• Advanced detector technology for imaging and precise endpoint detection
• In situ imaging with ions and electrons
• Microscope connectivity for risk-free specimen handling
• Adds capability and capacity
• Fast, reliable and easy to use

• Electrolytic polishing or chemical etching
• Simultaneous two-sided polishing
• No induced artifacts
• Easily adjustable flow rate, jet and specimen positions
• Reliable, accurate termination

• A precision ground punch and die plate eliminate specimen stress and distortion
• A spring-loaded return plunger keeps the disk specimen on the die plate surface for convenient handling
• Available in standard sizes of 1 mm, 2.3 mm, and 3.0 mm
• Other sizes available upon request

• Precise planar grinding
• Specimens up to 18 mm diameter

• Minimal mechanical and thermal damage
• Thin specimens (>10 µm) or thick (<1 cm)
• Rapidly cuts disks, rods, or rectangular specimens
• Automatic termination

• Fabricate precise cross-section specimens for transmission electron microscopy
• Aligns area of interest
• Produces consistent glue layer thickness

• Eliminates sample contamination during scanning electron microscope (SEM) operation
• SEM can be used while the Cryo-Can is cooled, even on SEMs without airlocks
• Contaminants condense onto a removable, cold surface
• Can work either before or while the SEM is operating

• Controlled thinning rate
• Precise
• Easy to use
• Automated operation
• Alignment microscope

• Ideal for room-temperature electron tomography
• High-tilt angles
• Optimised specimen clamping
• Extended field of view
• Easy, accurate specimen loading and centering

• Optimised for energy-dispersive X-ray spectroscopy
• Beryllium tip and clamps minimise X-ray interference
• High-tilt angles
• Large field of view
• Easy, accurate specimen loading and orientation

• Room temperature tomography in ultra-high resolution microscopes
• Extended field of view at high-tilt angles
• Can tilt up to 90º
• Suitable for ultra-narrow gap (< 3 mm) pole-piece geometries
• Optimised specimen protection during insertion into the TEM

• Fully jewelled mechanism for ultra-precise planar specimen rotation
• Optimised tilt in pole-piece gaps as small as 5 mm
• Ideal for room temperature electron tomography
• Maximises tomographic data obtained from the specimen
• Extended field of view
• Motorised version available

• Motorised rotational control for high-throughput applications
• Interfaces with the Thermo Fisher Scientific transmission electron microscope (TEM) control system
• Maximises tomographic data obtained from the specimen
• Allows for remote control of rotation and dual-axis functionality
• Extended field of view even at high-tilt angles
• FlexiClamp provides an easy, secure means of specimen retention
• Non-motorised version available

• Accepts either rod-shaped or conically-shaped specimens
• Ideal for specimens prepared by focused ion beam
• Ideal for atom probe tomography and field ion microscopy specimens
• Allows 360º image acquisition and tomographic reconstruction without the loss of information due to the missing wedge

• Suits both tomography and single particle cryo-EM 
• Works for other soft materials that may require cooling when imaging
• User friendly for specimen loading
• Unique mechanism for specimen unloading 
• Extended field of view at high tilt up to 80° (in TEMs with cryo pole pieces)
• Resolution to 0.18 nm 
• Low drift rate of 1.5 nm/minute
• Operating temperature below -175 °C

• An advanced mechanism retracts the specimen into the body of the holder, which seals and isolates the specimen from the surrounding atmosphere
• Ideal for sensitive specimens that can be altered by environmental conditions
• Optimised for transferring specimens under vacuum or in the presence of inert gas
• Provides a large field of view in transmission electron microscopes (TEMs) possessing a ST or wider gap pole piece
• Capable of tilting to ±70°; can be used for tomography in microscopes with pole-piece gaps > 5 mm 
• Accepts 3 mm specimens or specimen grids
• Available for both Thermo Fisher Scientific and JEOL TEMs

The Fischione Model 9010 Vacuum Storage Container is a portable device for the vacuum storage and transport of plasma cleaned specimens and transmission electron microscope (TEM) specimen holders. 

• High-precision valves ensure vacuum integrity
• Stores up to five transmission electron microscope specimen holders
• Provides safe storage of specimen holders under clean, vacuum conditions

• Evacuates the Fischione Instruments’ Model 2550 Cryo Transfer Tomography Holder during zeolite regeneration
• Pump down Thermo Fisher Scientific and JEOL TEM specimen holders and store the holders under clean, vacuum conditions 
• Configurable; stack single Thermo Fisher Scientific or JEOL holder ports or use a quad holder dock (shown at left) to mix up to four Thermo Fisher Scientific and/or JEOL ports 
• Four configurations available
• Reaches an ultimate pressure of < 10^-6 Torr
• Oil-free vacuum