Fischione Model 1040 NanoMill® TEM specimen preparation system
- Ultra-low energy ion source
- Concentrated ion beam
- Removes amorphous and implanted layers
- Ideal for post-focused ion beam processing and milling of conventionally prepared specimens
- Liquid nitrogen-cooled specimen stage
Revolutionary low energy, concentrated ion beam
Fischione’s Model 1040 NanoMill® TEM specimen preparation system is an excellent tool for creating the high-quality thin specimens needed for advanced transmission electron microscopy imaging and analysis. It is ideal for both post-FIB (focused ion beam) processing and the enhancement of conventionally prepared specimens.
Targeted, ultra low energy NanoMillingSM process
The NanoMill system features gaseous ion source technology that results in ion energies as low as 50 eV and a beam size as small as 1 µm. It allows specimens to be prepared without amorphization, implantation, or redeposition. The ion beam can be targeted to a specific area of interest. A secondary electron detector is used to image the ion-induced secondary electrons that are generated from the targeted area of the specimen.
Automated operation
The NanoMill system is easily programmable. Adjustable ion beam energies, milling angles, specimen rotation, and cryogenic specimen cooling parameters afford maximum flexibility to ensure the optimal preparation of a wide variety of specimens. A vacuum load lock facilitates rapid specimen exchange for high-throughput applications.
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Model 1040 NanoMill® TEM Specimen Preparation System Specifications |
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Ion source |
Filament-based ion source combined with electrostatic lens system |
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Variable voltage (50 eV to 2 kV), continuously adjustable |
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Beam current density up to 1 mA/cm2 |
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Beam diameter as small as 1 μm at 2,000 eV |
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Faraday cup for ion beam current monitoring with a range of 1 to 2,000 pA |
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Field-replaceable apertures |
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Specimen stage |
Load lock allows specimen exchange in less than 10 seconds |
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Transfer rod for specimen exchange |
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Milling angle range of −12 to +30° |
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Vacuum system |
Turbomolecular drag pump backed by an oil-free diaphragm pump |
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Chamber vacuum measurement with a combination cold cathode and Pirani gauge with a range of atmosphere to 1 x 10-8 mbar |
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System base vacuum of 3 x 10-7 mbar |
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Operating vacuum of 1 x 10-4 mbar |
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Gas |
Automated using mass flow control technology |
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Flow rate up to 2 sccm |
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Integral particulate filter |
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Inert gas (argon) with recommended purity of 99.999% |
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Specimen targeting |
Ion beam capable of being targeted at one spot on the specimen surface or scanned within a selected area |
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User interface |
Menu-driven interface |
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Programmable milling cycles with system status displayed |
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Chamber illumination |
User-controlled chamber illumination to facilitate specimen exchange |
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Specimen cooling |
Liquid nitrogen conductive cooling with automatic temperature interlocks |
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Stage temperature to –170 °C |
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System cool-down time less than 20 minutes |
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Specimen cool-down time less than 5 minutes |
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Dewar hold time up to 6 hours |
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Integral load lock heater ensures rapid specimen warming times to ambient temperature |
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Automatic termination |
Process termination by time or temperature |
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Imaging |
SED-based imaging technology |
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3 mm field of view |
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Everhart-Thornley detector |
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Specimen image displayed on graphical user interface |
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Dimensions |
39 in (991 mm) width x 58 in (1,474 mm) height x 31 in (788 mm) depth |
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Weight |
507 lb (230.5 kg) |
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Power |
110/220 V AC, 50/60 Hz, 1,000 W |
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Warranty |
One year |
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Service contract |
Available upon request |
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