Home Probe Stations RF Probing & Accessories EverBeing EB-6A MMWAVE THz Wafer Probe Station

EverBeing EB-6A MMWAVE THz Wafer Probe Station

Product Code:
EB-6A
Manufacturer: EverBeing

EverBeing offer a range of Millimeter-Wave Probe Stations for precise integration with your existing Vector Network Analysers (VNA), wave guides and frequency extenders from leading brands like Anritsu, Keysight, Rohde & Schwarz, VDI, OML. Two models are available EB-6A and EB-6V to accommodate the different sizes of waveguides and frequency extenders you prefer.

The EB-6A is designed specifically to accommodate Anritsu equipment whilst the EB-6V is more generic to work with Keysight, Rohde & Schwarz, VDI, and OML mmWave modules.

The EB-6V is more generic and designed to work with Keysight, Rohde & Schwarz, VDI, and OML mmWave modules.

 

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The EB-6A is a market proven solution developed closely together with Anritsu and provides the following features:

  • Customised positioners specifically for Anritsu broadband millimeter-wave modules
  • Integrated heat-sink and mount for millimeter-wave modules
  • Precise integration allowing direct link of probes
  • Double-side mmW probing upgradeable
  • Coaxial style high precision stage
  • Back-lash free movement
  • 4.5” probe card holder compatible
  • Micropositioner standby dock

Applications

  • High performance RF
  • Single broadband probing
  • Differential mm-Wave
  • Basic DC (IV/CV)

Accessories

  • Hot chuck with auxiliary chuck with temperature controller
  • Vibration free table
  • Shielding box
Station Specifications
Station Footprint  760 mm W x 660mm D
Station Height  450 mm (to Platen)/700 mm (to Microscope)
Station Weight  80kg
Platen Material  Hard Chrome Plated Steel
Platen Dimension  250 mm Inner, 450mm Outer
Platen Capacity  12 DC or 4 RF and 4 DC
Positioner Mount  Magnetic ON/OFF Switch
No. of Vacuum Switches  4
Chuck Material  Stainless Steel
Chuck Stage Type Coaxial
Chuck Travel Range  6” x 6”
Chuck Fine Resolution  1 μm
Chuck Theta Coarse Travel  360˚
Chuck Theta Fine Resolution  0.01˚
Chuck Z-Motion Range  4 mm
Chuck Z-Fine Resolution  1 μm
Coaxial Chuck Movement  Bevelled Gear and Rack 0.8 mm Pitch
Chuck Size  6” (150 mm)
Chuck Planarity  3 μm
Chuck Rigidity  15 μm / 10 N @ edge
Chuck Vacuum Grooves  Center, 0.5”, 1.5” ,2.5” (Individually Controlled)
Chuck Bias Capacity  Up to 2 kV
Chuck Isolation  5 GΩ
DUT Size Range  2 mm - 150 mm
Microscope Stage Type  High Precision Linear Stage
Microsope Stage Resolution  1 μm
Microscope Stage Travel Range  2” x 2”
Microscope Tilting (Optional)  35˚
Microscope Zoom Range  1x - 2x
Microscope Eye Piece  10x
Microscope Objectives  2x, 10x, 20x
Microscope Magnification Range 20x-400x
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